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Pompa próżniowa nEXT85D ISO63 NW16 80W

Pompa próżniowa nEXT85D ISO63 NW16 80W

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The nEXT85 turbomolecular pump builds upon the success of the highly successful EXT75DX to deliver a pump with significantly improved performance in a smaller package.

The rotor has been totally re-designed to optimise pump performance and achieve both higher speeds and higher compression while maintaining high levels of reliability.

In addition to enhanced performance nEXT85 benefits from the same service and operational functionalities from the larger nEXT range, including field serviceability and in-built intelligence, for a truly class leading product.

The nEXT85 turbomolecular pump builds upon the success of the highly successful EXT75DX to deliver a pump with significantly improved performance in a smaller package.

The rotor has been totally re-designed to optimise pump performance and achieve both higher speeds and higher compression while maintaining high levels of reliability.

In addition to enhanced performance nEXT85 benefits from the same service and operational functionalities from the larger nEXT range, including field serviceability and in-built intelligence, for a truly class leading product.

Features and Benefits

•  Class leading performance in a reduced footprint
•  Enhanced customer choice with standard and compression focused variants
•  Increased operating envelope maximised by Edwards’ patented direct impeller temperature measurement technology
•  Additional flexibility from customised interstage and backing port position selection
•  4 year service with full end-user field serviceability
•  CMSD enabled low vibration levels
•  Intelligent pumps with included micro USB port and Edwards nST software allowing pump monitoring, control and configuration
•  Full suite of tailored accessories
 

Technical Data

 

 

NW40

ISO63

CF63

ISO100

Inlet Pumping Speed ls-1

N2

48

84

85

 

Ar

44

80

80

 

He

61

79

77

 

H2

50

61

54

Compression Ratio

N2

>1 x 1011

 

Ar

1 x 109

 

He

8.5 x 106

 

H2

2.1 x 105

Interstage Pumping Speed (70 sccm gas load) ls-1

N2

6

 

Ar

6

 

He

9

 

H2

10

Backing/Interstage Port Size

NW16

Vent/Purge Port

NW16

Maximum Continuous Inlet flow N2

 

Forced Air Cooled (35 oC ambient)

sccm

30

Forced Air Cooled (23 oC ambient)

sccm

60

Water Cooled (35 oC ambient)

sccm

50

Water Cooled (23 oC ambient)

sccm

60

Natural Convection (30 oC ambient)

sccm

10

Natural Convection (23 oC ambient)

sccm

25

Maximum Continuous Backing Pressure N2

 

Forced Air Cooled (35 oC ambient)

mbar

10

Forced Air Cooled (23 oC ambient)

mbar

16

Water Cooled (35 oC ambient)

mbar

10

Water Cooled (23 oC ambient)

mbar

16

Natural Convection (30 oC ambient)

mbar

1

Natural Convection (23 oC  ambient)

mbar

2

Start Time to 90% Speed (80 W)

sec

115

Nominal Rotational Speed

rpm

90,000

 

Mass

kg

3.0

 

2.9

4.3

3.2